1 d6f-p d6f-p mems flow sensor a compact, high-accuracy flow sensor with superior resistance to environments. ? anti-dust performance is improved using the cyclon method. ? a full lineup of models with different connector types: barb joints, lead terminals for direct mounting on-board, and mani- folds. ? high accuracy of 5% fs. ordering information note: 1. the sensor be calibrated for different ga s types. consult your omron representative. note: 2. dry gas must not contain large particles, e.g., dust, oil, or mist. output voltage characteristics d6f-p0001a1 measurement conditions: power supply voltage of 12 0.1 vdc, ambient tem- perature of 25 5 c, and ambient humidity of 35% to 75%. d6f-p0010a1/-p0010a2/-p0010am2 measurement conditions: power supply voltage of 1 0.1 vdc, ambient temper- ature of 25 5 c, and ambient humidity of 35% to 75%. rohs compliant refer to the safety precautions on page 4. model applicable fluid (see note 1.) flow rate range minimum order d6f-p0001a1 (lead terminals) air (see note 2.) 0 to 0.1 l/min. 25 d6f-p0010a1 (lead terminals) 0 to 1 l/min. 25 d6f-p0010a2 (connector) 25 d6f-p0010am2 (connector manifold mount) 25 D6F-CABLE2 (optional) (a2 and am2) ?? 25 flow rate l/min (normal) 0 0.02 0.04 0.06 0.08 0.10 output voltage v 0.50 0.10 0.90 0.10 1.30 0.10 1.70 0.10 2.10 0.10 2.50 0.10 3.0 2.5 2.0 1.5 1.0 0.5 0.0 0.02 0.04 0.06 0.08 0.10 0 output voltage (v) flow rate (l/min) flow rate l/min (normal) 0 0.25 0.50 0.75 1.00 output voltage v 0.50 0.10 1.60 0.10 2.10 0.10 2.31 0.10 2.50 0.10 3.0 2.5 2.0 1.5 1.0 0.5 0.0 0.25 0.5 0.75 1 0 output voltage (v) flow rate (l/min)
2 d6f-p mems flow sensor d6f-p characteristics/performance note: 1. a 0 to 1 l/min. (normal) volumetric flow rate at 0 c, 101.3 kpa. note: 2. dry gas. (must not contain large particles, e.g., dust, oil, or mist.) note: 3. reference (typical) model d6f-0001a1 d6f-p0010a1 d6f-p0010a2 d6f-p0010am2 flow range (see note 1.) 0 to 0.1 l/min 0 to 1 l/min calibration gas (see note 2.) air flow port type barb joint maximum outside diameter: 4.9 mm manifold electrical connection lead terminals lead terminal three-pin connector power supply 4.75 to 5.25 vdc current consumption 15 ma max. with no load and a vcc of 5.0 v output voltage 0.5 to 2.5 vdc (load resistance: 10 k ) accuracy 5% fs (25 c characteristic) repeatability (see note 3.) 1.0% fs 0.4% fs output voltage (max.) 3.1 vdc (load resistance: 10 k ) output voltage (min.) 0 vdc (load resistance: 10 k ) rated power supply voltage 10 vdc rated output voltage 4 vdc case pbt degree of protection iec ip40 withstand pressure 50 kpa pressure drop (see note 3.) 0.005 kpa 0.19 kpa 0.67 kpa operating temperature ? 10 to 60 c (with no condensation or icing) operating humidity 35% to 85% (with no condensation or icing) storage temperature ? 40 to 80 c (with no condensation or icing) storage humidity 35% to 85% (with no condensation or icing) temperature characteristics 5% fs for 25c characteristic at an ambient temperature of -10 to 60c insulation resistance between sensor outer cover and lead terminals: 20 m min. (at 500 vdc) dielectric strength between sensor outer cover and lead terminals: 500 vac, 50/60 hz min. for 1 min (leakage current: 1 ma max.) weight 8.5 g 8.0 g
3 d6f-p mems flow sensor d6f-p connections/dimensions (unit: mm) pcb terminals connectors cable (optional) D6F-CABLE2 9.8 2.6 dia. 23.3 11.7 two, 4.9 dia. 1.2 7.3 13.5 4.76 2.8 dia. two, r: 1.4 1.5 6 10 17.2 two, 1.1 dia. label a recommended dimensions for connector mounting holes label: gives model and lot numbers. 27.2 1.7 6 16.2 14 7.6 0.2 13.2 7.2 d6f made in japan 2.54 5.08 detailed view of a connector xg8v-0344 (manufactured by omron) 2. vout 1. vcc 3. gnd 5.04 2.54 two, 3-dia. through hole 13.5 three, 1.3-dia. lands three, 0.8-dia. through holes 4.76 7.2 d6f-p0001a1/d6f-p0010a1 2.6 dia. 23.3 11.7 two, 4.9 dia. 1.2 7.3 13.5 2.8 dia. two, r: 1.4 1.5 10 17.2 8.5 a two, 1.1 dia. label detailed view of a label: gives model and lot numbers. 8.5 27.2 1.7 6 14 16.2 7.6 0.2 d6f made in japan 13.2 1.vcc 2.vout 3.gnd d6f-p0010a2 d6f-p0010am2 0.3 0.1 lot number label two, 0.3 (entire circumference) detailed view of a grooves to stop rotation detailed view of b connector details 3.5 dia. 27.2 22.1 14 0.05 2.7 0.1 0.3 0.1 6.7 0.1 *1 18 22 8 2 6.4 9.6 two, 4 dia. 0 ? 0.05 1 +0.1 0 a b d6f made in japan 3. gnd 2.vout 1.vcc 14 0.05 6.7 0.1 m3 threaded two, 7 dia. +0.5 0 *1. recommended installation dimensions note: use one of the following connectors from jst mfg. co., ltd. to connect to the d6f. 1) pressure welding connector socket: 03sr-3s wire: awg#30 or 2) crimp type connector contact: ssh-003t-p0.2 wire: awg#32 to #28 housing: shr-03v-s 15 3 (5) 180 10 3: gnd 2: vout white wire black wire red wire 1: vcc
4 d6f-p mems flow sensor d6f-p safety precautions the d6f is built for use with general-purpose devices. in cases such as those described below, where safety is required, imple- ment measures to ensure the safety of the system and all devices, such as fail-safe designs, redundancy designs, and reg- ular maintenance. ? safety devices for ensuring safety for persons ? transportation equipment control (such as applications to stop operation) ? aviation and space equipment ? nuclear power equipment do not use the d6f for applications in which d6f operation would directly affect human life. make sure that the power to all equipment is turned off before you install the sensor. installing the sensor while the power sup- ply is on may result in electrical shock or abnormal operation. fluids,tubes, and sensor installation all models (1) use clean fluids. dust and mist can affect the characteristics of the sensor or damage the sensor. install a filter and mist separator on the upstream tube. (not required for the d6f-w @ a1 or d6f-p.) (2) do not use combustible gases (e.g., hydrogen), corrosive gases (e.g., chlorine, sulfur, acidic, or alkali gas), or other non-approved fluids. they may damage the sensor. (3) the performance specifications that are given for the g6f do not apply if any fluids other than the specified applicable fluid are used. (4) foreign matter in the tubes that are connected to the sensor may damage the sensor. prevent any foreign matter from entering the tubes after the sensor is removed from its packaging. (5) attach the tubes so that fluid flows only in the direction des- ignated by the arrows on the sensor. correct measure- ments cannot be obtained if the fluid flows in the wrong direction. (6) we recommend that you install the tubes horizontally. if the tubes are not installed horizontally, an error of 1% fs or higher may result. (this does not apply to the d6f-03a3.) (7) install the sensor on a flat surface. incorrect installation may damage the sensor and make it impossible to obtain correct measurements. (8) after the sensor is installed, check to confirm that it oper- ates correctly. (9) do not drop the sensor, remove the cover, or attempt to dis- assemble the sensor in any way. d6f-p0001a1, d6f-p0010a1, and d6f-p0010a2 (1) depending on the ambient environment and installation location, dust, dirt, and other foreign matter may come in inside the sensor and block a part or all of the flow path or accumulate on internal components. this may result in the sensor not being able to perform to the specifications given above. always perform a pre-evaluation on your actual equipment and be aware of the possible problems that may occur before you use the sensor with the actual equipment. (2) attach all tubes so that the fluid flows only in the direction from the positive side ( + ) to the negative side ( ? ). (3) for pcb-mounting, perform terminal soldering only after the sensor is secured into place on the pcb. (4) use m2.6 panhead screws or equivalent tapping screws to mount the sensor, and tighten the screws to a maximum torque of 0.59 nm. d6f-p0010am2 (1) depending on the ambient environment and installation location, dust, dirt, and other foreign matter may come in inside the sensor and block a part or all of the flow path or accumulate on internal components. this may result in the sensor not being able to perform to the specifications given above. always perform a pre-evaluation on your actual equipment and be aware of the possible problems that may occur before you use the sensor with the actual equipment. (2) attach all tubes so that the fluid flows only in the direction from the positive side ( + ) to the negative side ( ? ). (3) use m3 panhead screws or equivalent tapping screws to mount the sensor, and tighten the screws to a maximum torque of 0.59 nm. (4) install o-rings to seal the fluid inlet and outlet points. the recommended o-ring is jis b 2401, nominal number p4. operating environment do not use the sensor in the following locations: ? locations directly subject to heat radiated from heating equip- ment ? locations subject to water or oil ? locations subject to direct sunlight ? locations subject to intense temperature changes ? locations subject to icing or condensation ? locations subject to excessive vibration or shock countermeasures against noise noise may make it impossible to obtain correct measurements. consider the following countermeasures. ? allow as much space as possible between the sensor and devices that generates high frequencies (such as high-frequency welders and high-frequency sewing machines) or surges. ? attach surge absorbers or noise filters to noise-generating devices that are near the sensor (in particular, equipment with inductance, such as motors, transformers, solenoids, and magnetic coils). (it also helps to separate pipes and ducts, and to use shielded cables.) power supply ? do not directly solder power supply leads to the connector ter- minals. use only the appropriate connectors. ? wire with the correct terminal names and polarities. incorrect wiring will cause failure of internal components. ? when using a commercially available switching regulator, ground the fg (frame ground) and g (ground) terminals. warning caution precautions for correct use o-ring m3 panhead screw or a tapping screw with the same diameter installation example
5 d6f-p mems flow sensor d6f-p the rohs mark is displayed on the packing of products for which the six substances banned by the rohs directive have been abolished (both in processing and in the electronic compo- nents mounted to the pcbs). * rohs marking may be terminated if it is later determined that parts that were previously treated as rohs compliant are not compliant due to circumstanc- es at the supplier of the parts. rohs compliance criteria the following standards are used to determine rohs compli- ance for the six banned substances. (items to which the rohs directive is not applicable are not given.) ? lead: 1,000 ppm max. ? hexavalent chromium: 1,000 ppm max. ? mercury: 1,000 ppm max. ? pbb: 1,000 ppm max. ? cadmium: 100 ppm max. ? pbde: 1,000 ppm max. rohs directive
6 d6f-p mems flow sensor d6f-p ? application examples provided in this document are for reference only. in actual applications, confirm equipment functions and safety before using the product. ? consult your omron representative before using the product under conditions which are not described in the manual or applying t he product to nuclear control systems, railroad systems, aviation systems, vehicles, combustion systems, medical equipment, amusement machines, safety equipment, and other sys tems or equipment that may have a serious influence on lives and property if used improperly. make sure that the ratings and performance characteristics of the product p rovide a margin of safety for the system or equipment, and be sure to provide the system or equipment with double safety mechanisms. omron corporation electronic and mechanical components company contact: www.omron.com/ecb cat. no. a183-e1-01 0812
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